After-sales Service: | 2 Years |
---|---|
Warranty: | 1 Years |
Application: | School, Lab |
Customization: |
---|
Shipping Cost:
Estimated freight per unit. |
about shipping cost and estimated delivery time. |
---|
Payment Method: | |
---|---|
Initial Payment Full Payment |
Currency: | US$ |
---|
Return&refunds: | You can apply for a refund up to 30 days after receipt of the products. |
---|
Suppliers with verified business licenses
PECVD System
The PECVD system uses microwave or radio frequency to ionize the gas containing the film constituent atoms to form a plasma locally. The plasma has a strong chemical activity and is easy to react to deposit the desired film on the substrate. The system is widely used to deposit high-quality SiO2 film, Si3N4 film, diamond film, hard film, optical film, carbon nanotube (CNT), C/C composite material, SiC coating, graphite product coating, etc.
Model | DM-12NT-PECVD | DM-14ST-PECVD | DM-17MT-PECVD |
Max Temperature | 1200ºC | 1400ºC | 1700ºC |
Working Temperature | 1100ºC | 1300ºC | 1600ºC |
Heating Element | Resistance Wire | SiC | MoSi2 |
Thermocouple | K Type | S Type | B Type |
Temperature Zone | Number/Diameter/Length(Can Be Customized) | ||
Temperature Accuracy | ±1ºC | ||
Rated Voltage | AC220V50Hz/60Hz (can be customized) | ||
Gas Control | Float Flow Meter/Mass Flow Meter | ||
Vacuum System | Rotary Pump/Diffusion Pump/Turbo Molecular Pump(Optional) | ||
RF Power | 100-1000W(Optional) | ||
Optional Function | Touch Screen/Remote Control/Computer Monitoring | ||
Can Be Customized |
Q1. How about after-sales service ?
Suppliers with verified business licenses