High Pressure Tube Furnace High Temperature Equipment Tube Furnace Pecvd System

• After-sales Service: 2 Years
• Warranty: 1 Years
• Application: School, Lab
• Shipping Cost: Estimated freight per unit.: about shipping cost and estimated delivery time.
• Currency: US$
• Return&refunds: You can apply for a refund up to 30 days after receipt of the products.
• Model NO.: PECVD System
• Customized: Customized
• Structure: Desktop
• Material: Stainless Steel
• Type: Electric Stove
• Model: Dm-17mt-Pecvd
• Max Temperature: 1700c
• Working Temperature: 1600c
• Heating Element: Mosi2
• Transport Package: Wooden Box
• Specification: /
• Trademark: Dming
• Origin: China
• Package Size: 100.00cm * 100.00cm * 100.00cm
• Package Gross Weight: 100.000kg

Product Description

Product Description

PECVD System 
The PECVD system uses microwave or radio frequency to ionize the gas containing the film constituent atoms to form a plasma locally. The plasma has a strong chemical activity and is easy to react to deposit the desired film on the substrate. The system is widely used to deposit high-quality SiO2 film, Si3N4 film, diamond film, hard film, optical film, carbon nanotube (CNT), C/C composite material, SiC coating, graphite product coating, etc.
 

 

 

 

Product Parameters

 

Model	DM-12NT-PECVD	DM-14ST-PECVD	DM-17MT-PECVD
Max Temperature	1200ºC	1400ºC	1700ºC
Working Temperature	1100ºC	1300ºC	1600ºC
Heating Element	Resistance Wire	SiC	MoSi2
Thermocouple	K Type	S Type	B Type
Temperature Zone	Number/Diameter/Length(Can Be Customized)
Temperature Accuracy	±1ºC
Rated Voltage	AC220V50Hz/60Hz (can be customized)
Gas Control	Float Flow Meter/Mass Flow Meter
Vacuum System	Rotary Pump/Diffusion Pump/Turbo Molecular Pump(Optional)
RF Power	100-1000W(Optional)
Optional Function	Touch Screen/Remote Control/Computer Monitoring
Can Be Customized

 

Packaging & Shipping

Company Profile

 

Our Advantages

 

FAQ

 

Q1. How about after-sales service ?
A1. We have professional pre-sales and after-sales departments and can respond  you within 8hrs
Q2. How about the quality guarantee period?
A2: 2 years, exclude irrationally operating and consumable parts.
Q3. How about the quality?
A3: CE certification available and twice test before shipping.
Q4. How about the delivery time?
A4: Shipping within 3 days for regular model . 35 days for customized model.
Q5. Are you a manufacturer or a trading company?
A5: We are a factory with 10 years experience in this field.