1200c Pecvd Tube Furnace Coating Machine CVD Graphene Growth RF Plasma CVD for Sio2 Si3n4 Sic Graphene Coating

• Customization: Available
• After-sales Service: Provide Technical Support for Life
• Warranty: 1 Year
• Customized: Customized
• Certification: CE
• Structure: Portable
• Material: Steel
• Type: Tubular Furnace
• Product Name: 1200c Pecvd Furnace
• Usage: Coating
• Max. Temperature: 1200c
• Length of Heating Zone: 440mm
• Length of Constant Temperature Zone: 200mm
• Voltage: AC220V50Hz
• Power: 3kw
• Temperature Control: Pid Automatic
• Heating Element: Electric Resistance Wire with Mo
• Thermocouple: K Type
• Quartz Tube Size: Dia80/72*1500mm
• Number of Gas Paths: 3
• Flowmeter: Mass Flowmeter
• Vacuum: 10(-1)PA
• Power of RF Generator: Max 500W
• Transport Package: Wooden Package
• Trademark: Dming
• Origin: China
• HS Code: 85141990
• Production Capacity: 200 Sets Per Month

Product Description

Product Description

1200C PECVD Tube Furnace Coating Machine CVD Graphene Growth RF Plasma CVD for SiO2 Si3N4 SiC Graphene Coating

PECVD system, by ionizing atom-containing gas with microwave or radio frequency,create active plasma locally,which will react easily to deposit and form the expected thin film. It widely used to product high-quality  SiO₂film ,Si₃N₄  film,diamond film, hard thin film ,optical thin film,CNT,C/C composite materials,SiC coating, Graphene etc.

Technical Parameter
Model	DM-12ST-PECVD	Max Temp.	1200	Tube Diameter(mm)	50-100
Tube Length(mm)	1500	Temp. zone	3	Length of heating zone(mm)	200+200+200
Power	11kw	Voltage	AC220V50Hz	Furnace tube material	quartz
RF power	500w	RF frequency	13.56MHz	RF interface	50Ω  N-Type
Vacuum	5*10(-3)Pa	Noise	<50dB	Barometer	0-500sccm

The working temperature, the number of temperature zones, the length and diameter of the heating zone, and the degree of vacuum can all be customized!

Company Profile

 

Dming Technology is the leading manufacturer of lab furnace, industrial furnace and the related accessories.As a manufacturer with more than 10 years' experience in thermal engineering, Dming Technology offers the wide and deep range of furnaces worldwide. Satisfied customers in more than 30 countries offer proof of our commitment to excellent design, quality and cost efficiency.Dming Technology offers a complete line of high temperature processing technologies in many styles and configurations.From muffle furnaces, Melting furnace, distillation furnace, electric arc furnace to vacuum sintering furnaces(Powder Metallurgy), Mesh belt furnace,oil gas quenching furnace and large-scale production ceramic kilns.Our customized solutions include products and heat treatment processes designed to meet specific customer requirements, and provide sample testing until the customer is satisfied.

Packaging & Shipping

FAQ

Q1. How is your company's product after-sales service system?
A. We have professional pre-sales and after-sales departments and

can respond to you within 8 hours to resolve any technical issues.
Q2. How about the quality guarantee period?
A:2 years, exclude irrationally operating and consumable parts.
Q3. How about your products quality?
CE certification available and twice test before shipping.
Q4. What's your delivery time?
35 days 
Q5. Are you a manufacturer or a trading company?
We are a factory with 10 years experience in the field.